Vane Pumps

A rotary vane pump is a positive-displacement pump that consists of vanes mounted to a rotor that rotates inside of a cavity. In some cases these vanes can have variable length and/or be tensioned to maintain contact with the walls as the pump rotates.

Vane pumps can be used in low-pressure gas applications such as secondary air injection for auto exhaust emission control, or in low-pressure chemical vapor deposition systems. Rotary-vane pumps are also a common type of vacuum pump, with two-stage pumps able to reach pressures well below 10⁻⁶ bar.